Microelectronic devices based on ultra-shallow junctions and silicon-on-insulator materials by Anders Söderbärg
Material type: TextLanguage: English Series: Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science / Uppsala Universitet: Acta Universitatis Upsaliensis / Comprehensive summaries of Uppsala dissertations from the Faculty of Science ; 352Publication details: Uppsala Univ. 1991, 1991Description: 42 S. Ill., graph. DarstISBN:- 9155428231
- 02827468
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Vollst. zugl.: Uppsala, Univ., Diss., 1991
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