Microelectromechanical structures for materials research :  symposium held April 15-16, 1998 , San Francisco, California, U.S.A. / 
editors, Stuart Brown ... [et al.]. 
 -  Materials Research Society,  c1998. 
 - xi, 248 p. :  ill. ;  24 cm. 
 - (Materials Research Society symposium proceedings ; v. 518) .
 - .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>1558994246 
<br/><br/><label>LCCN: </label>98049136  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Materials--Research--Equipment and supplies--Congresses.<br/>Microelectromechanical systems--Congresses.
<br/><br/><label>LC Class. No.: </label>TA404.2  / .M53 1998 
<br/><br/><label>Dewey Class. No.: </label>620.1/1/072 
<br/><br/><label>Universal Decimal Class. No.: </label>620.1(063)