TY  - BOOK
AU  - Brown,Stuart B.
TI  - Microelectromechanical structures for materials research: symposium held April 15-16, 1998 , San Francisco, California, U.S.A. 
T2  - (Materials Research Society symposium proceedings ; v. 518)
SN  - 1558994246
AV  - TA404.2 .M53 1998
U1  - 620.1/1/072 21
PY  - 1998///
CY  - Warrendale, Pa.
PB  - Materials Research Society
KW  - Materials
KW  - Research
KW  - Equipment and supplies
KW  - Congresses
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -