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Modelling and micromachining of capacitive microphones /

Bergqvist, Johan

Modelling and micromachining of capacitive microphones / by Johan Bergqvist. - Uppsala : Univ., 1994. - 38 p. : fig., tab.

Vollst. zugl.: Uppsala, Univ., Diss., 1994.

Includes bibliogr. references.

Subjects--Index Terms: ელექტროტექნიკა მიკროფონები

Universal Decimal Class. No.: 621.395.61

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Modelling and micromachining of capacitive microphones /