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Influence of substrate reactivity on chemical vapour deposition processes /

Boman, Mats

Influence of substrate reactivity on chemical vapour deposition processes / Mats Boman. - Almqvist & Wiksell, 1986. - 27 p. : Ill. - Comprehensive summaries of Uppsala dissertations from the Faculty of Science ; 56 .

Zugl.: Uppsala, Univ., Diss., 1986

ISBN: 9155419232

Subjects--Index Terms: ქიმია

Universal Decimal Class. No.: 54

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Influence of substrate reactivity on chemical vapour deposition processes /