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Silicon microstructures for biomedical sensor systems /

Rosengren, Lars

Silicon microstructures for biomedical sensor systems / by Lars Rosengren. - Univ. 1994, 1994. - 36 S. : Ill., graph. Darst. - Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology / Uppsala Universitet: Acta Universitatis Upsaliensis / Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology 54 .

Vollst. zugl.: Uppsala, Univ., Diss., 1994

ISBN: 9155433170

ISSN: 1104232X

Subjects--Index Terms: სილიკონის მიკროსტრუქტურები ბიომედიცინა

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Silicon microstructures for biomedical sensor systems /