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Thermodynamic and experimental CVD studies of TiSi₂ and W /

Engqvist, Jan

Thermodynamic and experimental CVD studies of TiSi₂ and W / Jan Engqvist. - Uppsala : Acta Universitatis Upsaliensis, 1992. - 31 p. : fig. - Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ; 413 .

Dissertation: doctoral Uppsala University 1992.

Includes bibliographical references.

ISBN: 9789155430184 9789155430184

Subjects--Index Terms: ფიზიკა თერმოდინამიკა ქიმია

Universal Decimal Class. No.: 536.3 : 54

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Thermodynamic and experimental CVD studies of TiSi₂ and W /