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CVD and ALD of group IV- and V-oxides for dielectric applications /

Forsgren, Katarina

CVD and ALD of group IV- and V-oxides for dielectric applications / Katarina Forsgren. - Uppsala : Acta Universitatis Upsaliensis, 2001. - viii, 55 p. - Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ; 665 . - Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology Uppsala universitet 665 .

Zugl.: Uppsala, Univ., Diss., 2001.

ISBN: 9155451438

Subjects--Index Terms: ქიმია არაორგანული ქიმია

Index Terms--Genre/Form:
Hochschulschrift

Universal Decimal Class. No.: 546

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CVD and ALD of group IV- and V-oxides for dielectric applications /