Silicon micromechanics with applications in optical scanning and sensing systems /
Gustafsson, kari
Silicon micromechanics with applications in optical scanning and sensing systems / Kari Gustafsson. - Uppsala : Uppsala University, 1988.
621.38
Silicon micromechanics with applications in optical scanning and sensing systems / Kari Gustafsson. - Uppsala : Uppsala University, 1988.
621.38