MARC details
000 -LEADER |
fixed length control field |
01427nam a22003257a 4500 |
001 - CONTROL NUMBER |
control field |
727113 |
005 - DATE AND TIME OF LATEST TRANSACTION |
control field |
20150315091851.0 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
fixed length control field |
111221s1998 us ||||| |||| 00| 0 eng d |
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
LC control number |
98034108 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
1558994386 |
040 ## - CATALOGING SOURCE |
Original cataloging agency |
DLC |
Transcribing agency |
DLC |
Modifying agency |
DLC |
050 00 - LIBRARY OF CONGRESS CALL NUMBER |
Classification number |
TK7871.85 |
Item number |
.S5464 1998 |
080 ## - UNIVERSAL DECIMAL CLASSIFICATION NUMBER |
Universal Decimal Classification number |
678.8 |
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
621.3815/2 |
Edition number |
21 |
245 00 - TITLE STATEMENT |
Title |
Silicon front-end technology--materials processing and modelling / |
Statement of responsibility, etc |
editors, Nicholas E.B. Cowern ... [et al.]. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
Place of publication, distribution, etc |
Warrendale, Pa. : |
Name of publisher, distributor, etc |
Materials Research Society, |
Date of publication, distribution, etc |
c1998. |
300 ## - PHYSICAL DESCRIPTION |
Extent |
xi, 228 p. : |
Other physical details |
ill. (some col.) ; |
Dimensions |
24 cm. |
490 1# - SERIES STATEMENT |
სერიის ცნობა |
(Materials Research Society symposium proceedings ; |
Volume number/sequential designation |
v. 532) |
ლინკი |
16150 |
500 ## - GENERAL NOTE |
General note |
Proceedings of a symposium held April 13-15, 1998 in San Francisco, California. |
504 ## - BIBLIOGRAPHY, ETC. NOTE |
Bibliography, etc |
Includes bibliographical references and index. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Semiconductors |
General subdivision |
Design and construction |
Form subdivision |
Congresses. |
9 (RLIN) |
8447 |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Semiconductor doping |
Form subdivision |
Congresses. |
9 (RLIN) |
8448 |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Semiconductors |
General subdivision |
Defects |
Form subdivision |
Congresses. |
9 (RLIN) |
8449 |
700 1# - ADDED ENTRY--PERSONAL NAME |
Personal name |
Cowern, Nicholas E. B. |
9 (RLIN) |
8450 |
830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
Uniform title |
Materials Research Socisty symposia ; |
Volume number/sequential designation |
v. 532. |
9 (RLIN) |
8451 |
906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) |
a |
7 |
b |
cbc |
c |
orignew |
d |
1 |
e |
ocip |
f |
19 |
g |
y-gencatlg |
942 ## - ADDED ENTRY ELEMENTS (KOHA) |
Source of classification or shelving scheme |
Universal Decimal Classification |
Item type |
წიგნი |