National Science Library of Georgia

A guide to hands-on MEMS design and prototyping / (Record no. 519414)

MARC details
000 -LEADER
fixed length control field 02224nam a22003498i 4500
001 - CONTROL NUMBER
control field CR9780511984662
003 - CONTROL NUMBER IDENTIFIER
control field UkCbUP
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20200124160250.0
006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS--GENERAL INFORMATION
fixed length control field m|||||o||d||||||||
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
fixed length control field cr||||||||||||
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 101130s2011||||enk o ||1 0|eng|d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780511984662 (ebook)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Cancelled/invalid ISBN 9780521889254 (hardback)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Cancelled/invalid ISBN 9781107645790 (paperback)
040 ## - CATALOGING SOURCE
Original cataloging agency UkCbUP
Language of cataloging eng
Description conventions rda
Transcribing agency UkCbUP
050 00 - LIBRARY OF CONGRESS CALL NUMBER
Classification number TK7875
Item number .K83 2011
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.381
Edition number 22
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Kubby, Joel A.,
Relator term author.
245 12 - TITLE STATEMENT
Title A guide to hands-on MEMS design and prototyping /
Statement of responsibility, etc Joel Kubby.
246 3# - VARYING FORM OF TITLE
Title proper/short title A Guide to Hands-on MEMS Design & Prototyping
264 #1 - Production, Publication, Distribution, Manufacture, and Copyright Notice (R)
Place of production, publication, distribution, manufacture (R) Cambridge :
Name of producer, publisher, distributor, manufacturer (R) Cambridge University Press,
Date of production, publication, distribution, manufacture, or copyright notice 2011.
300 ## - PHYSICAL DESCRIPTION
Extent 1 online resource (xi, 166 pages) :
Other physical details digital, PDF file(s).
336 ## - Content Type (R)
Content type term (R) text
Content type code (R) txt
Source (NR) rdacontent
337 ## - Media Type (R)
Media type term (R) computer
Media type code (R) c
Source (NR) rdamedia
338 ## - Carrier Type (R)
Carrier type term (R) online resource
Carrier type code (R) cr
Source (NR) rdacarrier
500 ## - GENERAL NOTE
General note Title from publisher's bibliographic system (viewed on 05 Oct 2015).
505 8# - FORMATTED CONTENTS NOTE
Formatted contents note Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics.
520 ## - SUMMARY, ETC.
Summary, etc Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Microelectromechanical systems.
776 08 - ADDITIONAL PHYSICAL FORM ENTRY
Display text Print version:
International Standard Book Number 9780521889254
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="https://doi.org/10.1017/CBO9780511984662">https://doi.org/10.1017/CBO9780511984662</a>

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