Focused ion beam systems : (Record no. 521798)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 03446nam a22003618i 4500 |
| 001 - CONTROL NUMBER | |
| control field | CR9780511600302 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | UkCbUP |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20200124160320.0 |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS--GENERAL INFORMATION | |
| fixed length control field | m|||||o||d|||||||| |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
| fixed length control field | cr|||||||||||| |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 090722s2007||||enk o ||1 0|eng|d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780511600302 (ebook) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| Cancelled/invalid ISBN | 9780521831994 (hardback) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| Cancelled/invalid ISBN | 9780521158596 (paperback) |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | UkCbUP |
| Language of cataloging | eng |
| Description conventions | rda |
| Transcribing agency | UkCbUP |
| 050 04 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | QC702.7.B65 |
| Item number | F63 2007 |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Edition number | 22 |
| 245 00 - TITLE STATEMENT | |
| Title | Focused ion beam systems : |
| Remainder of title | basics and applications / |
| Statement of responsibility, etc | edited by Nan Yao. |
| 264 #1 - Production, Publication, Distribution, Manufacture, and Copyright Notice (R) | |
| Place of production, publication, distribution, manufacture (R) | Cambridge : |
| Name of producer, publisher, distributor, manufacturer (R) | Cambridge University Press, |
| Date of production, publication, distribution, manufacture, or copyright notice | 2007. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 1 online resource (xi, 395 pages) : |
| Other physical details | digital, PDF file(s). |
| 336 ## - Content Type (R) | |
| Content type term (R) | text |
| Content type code (R) | txt |
| Source (NR) | rdacontent |
| 337 ## - Media Type (R) | |
| Media type term (R) | computer |
| Media type code (R) | c |
| Source (NR) | rdamedia |
| 338 ## - Carrier Type (R) | |
| Carrier type term (R) | online resource |
| Carrier type code (R) | cr |
| Source (NR) | rdacarrier |
| 500 ## - GENERAL NOTE | |
| General note | Title from publisher's bibliographic system (viewed on 05 Oct 2015). |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | Interactions of ions with matter / Nobutsugu Imanishi -- Gas assisted ion beam etching and disposition / Hyoung Ho (Chris) Kang, Clive Chandler, and Matthew Weschler -- Imaging using electrons and ion beams / Kaoru Ohya and Tohru Ishitani -- Characterization methods using FIB/SEM DualBeam instrumentation / Steven Reyntjens and Lucille A. Giannuzzi -- High-density FIB SEM 3D nanotomography : with applications of real-time imaging during FIB milling / E.L. Principe -- Fabrication of nanoscale structures using ion beams / Ampere A. Tseng -- Preparation for physico-chemical analysis / Richard Langford -- In-situ sample manipulation and imaging / T. Kamino [and others] -- Micro-machining and mask repair / Mark Utlaut -- Three-dimensional visualization of nanostructured materials using focused ion beam tomography / Derren Dunn, Alan J. Kubis, and Robert Hull -- Ion beam implantation of surface layers / Daniel Recht and Nan Yao -- Applications for biological materials / Kirk Hou and Nan Yao -- Focused ion beam systems as a multifunctional tool for nanotechnology / Toshiaki Fujii, Tatsuya Asahata, and Takashi Kaito. |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc | The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modification tool. Presenting the principles, capabilities, challenges and applications of the FIB technique, this edited volume, first published in 2007, comprehensively covers the ion beam technology including the DualBeam. The basic principles of ion beam and two-beam systems, their interaction with materials, etching and deposition are all covered, as well as in situ materials characterization, sample preparation, three-dimensional reconstruction and applications in biomaterials and nanotechnology. With nanostructured materials becoming increasingly important in micromechanical, electronic and magnetic devices, this self-contained review of the range of ion beam methods, their advantages, and when best to implement them is a valuable resource for researchers in materials science, electrical engineering and nanotechnology. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Focused ion beams. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Focused ion beams |
| General subdivision | Industrial applications. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Ion bombardment. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Yao, Nan, |
| Relator term | editor. |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY | |
| Display text | Print version: |
| International Standard Book Number | 9780521831994 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | <a href="https://doi.org/10.1017/CBO9780511600302">https://doi.org/10.1017/CBO9780511600302</a> |
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