Title from publisher's bibliographic system (viewed on 05 Oct 2015).

Overview of sputter-desposited TiNi based thin films -- Martensitic transformation in TiNi alloys -- Deposition techniques for TiNi thin film -- TiNi multilayer thin films -- Crystallization and microstructural development -- Mechanical properties of TiNi thin films -- Stress and surface morphology evolution -- Ion implantation processing and associated irradiation effects -- Laser post-annealing and theory -- Overview of thin film shape memory alloy applications -- Theory of SMA thin films for microactuators and micropumps -- Binary and ternary alloy film diaphragm microactuators -- TiNi thin film devices -- Shape memory microvalves -- Superrelastic thin fims and applications for medical devices -- Fabrication and characterization of sputter-deposited TiNi superelastic microtubes -- Thin film shape memory microcage for biological applications -- Shape memory thin fim composite microactuators -- TiNi thin film shape memory alloys for optical sensing applications.

This book, the first dedicated to this exciting and rapidly growing field, enables readers to understand and prepare high-quality, high-performance TiNi shape memory alloys (SMAs). It covers the properties, preparation and characterization of TiNi SMAs, with particular focus on the latest technologies and applications in MEMS and biological devices. Basic techniques and theory are covered to introduce new-comers to the subject, whilst various sub-topics, such as film deposition, characterization, post treatment, and applying thin films to practical situations, appeal to more informed readers. Each chapter is written by expert authors, providing an overview of each topic and summarizing all the latest developments, making this an ideal reference for practitioners and researchers alike.