Materials, technology, and reliability for advanced interconnects and low-k dielectrics :  symposium held April 23-27, 2000, San Francisco, California, U.S.A / 
editors, G.S. Oehrlein ... [et al.]. 
 -  Materials Research Society,  c2001. 
 - 1 v. (various pagings) :  ill. ;  24 cm. 
 - (Materials Research Society symposium proceedings ;  v. 612) .
 - Materials Research Society symposia proceedings ;  v. 612. .
<br/><br/>Includes bibliographical references and indexes. 
<br/><br/><label>ISBN: </label>155899520X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Materials--Congresses.<br/>Semiconductors--Junctions--Congresses.<br/>Dielectric films--Congresses.<br/>Integrated circuits--Materials--Congresses.<br/>Integrated circuits--Reliability--Congresses.
<br/><br/><label>Universal Decimal Class. No.: </label>620.22