TY  - BOOK
AU  - Oehrlein,G.S.
TI  - Materials, technology, and reliability for advanced interconnects and low-k dielectrics: symposium held April 23-27, 2000, San Francisco, California, U.S.A 
T2  - (Materials Research Society symposium proceedings
SN  - 155899520X
PY  - 2001///
CY  - Warrendale, Pa.
PB  - Materials Research Society
KW  - Semiconductors
KW  - Materials
KW  - Congresses
KW  - Junctions
KW  - Dielectric films
KW  - Integrated circuits
KW  - Reliability
N1  - Includes bibliographical references and indexes
ER  -