Microlithography world  [electronic resource]. 

 -  Penn Well Publication, published in cooperation with SPIE,  [1992- 
 - Quarterly,  Jan./Feb./Mar. 1993- 
 - Vol. 1, no. 1 (Mar./Apr. 1992)- 
<br/><br/> Title from cover.  Published: Tulsa, OK, Oct., Nov., Dec. 1993-  Latest issue consulted: Vol. 4, no. 2 (spring 1995).  Trade Publication 
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<br/><br/><label>ISSN: </label>1074-407X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction--Periodicals.<br/>Microlithography--Periodicals.<br/>Masks (Electronics)--Periodicals.
<br/><br/><label>LC Class. No.: </label>TK7871.85  / .M519