TY  - SER
ED  - Society of Photo-optical Instrumentation Engineers.
TI  - Microlithography world
SN  - 1074-407X
AV  - TK7871.85 .M519
PY  - 1992///-
CY  - Port Washington, N.Y.
PB  - Penn Well Publication, published in cooperation with SPIE
KW  - Semiconductors
KW  - Design and construction
KW  - Periodicals
KW  - Microlithography
KW  - Masks (Electronics)
N1  - Title from cover; Published: Tulsa, OK, Oct., Nov., Dec. 1993-; Latest issue consulted: Vol. 4, no. 2 (spring 1995); Trade Publication; Online version of print publication
UR  - http://search.ebscohost.com/direct.asp?db=aph&jid=%229CK%22&scope=site
ER  -