TY - BOOK AU - Boman,Mats TI - Influence of substrate reactivity on chemical vapour deposition processes / T2 - Comprehensive summaries of Uppsala dissertations from the Faculty of Science ; SN - 9155419232 PY - 1986/// CY - Uppsala PB - Almqvist & Wiksell, KW - ქიმია N1 - Zugl.: Uppsala, Univ., Diss., 1986 ER -