TY - BOOK AU - Westberg,Helena TI - Thermal laser-assisted chemical vapour deposition: aspects of kinetics and materials structures T2 - Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science / Uppsala Universitet: Acta Universitatis Upsaliensis / Comprehensive summaries of Uppsala dissertations from the Faculty of Science SN - 9155429181 SN - 02827468 PY - 1992///, 1992 CY - Uppsala PB - Univ. KW - ქიმია KW - თერმული ლაზერი N1 - Vollst. zugl.: Uppsala, Univ., Diss., 1992 ER -