The Physics and fabrication of microstructures and microdevices : proceedings of the winter school, Les Houches, France, March 25-April 5, 1986 / editors M. J. Kelly and C. Weisbuch. - Springer-Verlag, c1986. - xi, 469 p. : ill. ; 25 cm. - Springer proceedings in physics ; v. 13 .

Proceedings of the Winter School on "the Physics and Fabrication of Microstructures."

Includes bibliographies and index.

0387168982 (U.S.)

86017731


Semiconductors--Congresses.
Integrated circuits--Very large scale integration--Design and construction--Congresses.
Semiconductors--Design and construction--Congresses.

ფიზიკა ნახევარგამტარები დიზაინი და კონსტრუქცია კონგრესები

TK7871.85 / .P47 1986

621.3815/2

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