TY  - BOOK
AU  - Weisbuch,C.
AU  - Kelly,M.J.
ED  - Winter School on "the Physics and Fabrication of Microstructures"
TI  - The Physics and fabrication of microstructures and microdevices: proceedings of the winter school, Les Houches, France, March 25-April 5, 1986 
SN  - 0387168982 (U.S.)
AV  - TK7871.85 .P47 1986
U1  - 621.3815/2 19
PY  - 1986///
CY  - Berlin, New York
PB  - Springer-Verlag
KW  - Semiconductors
KW  - Congresses
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Design and construction
KW  - ფიზიკა
KW  - ნახევარგამტარები
KW  - დიზაინი და კონსტრუქცია
KW  - კონგრესები
N1  - Proceedings of the Winter School on "the Physics and Fabrication of Microstructures."; Includes bibliographies and index
ER  -