TY  - BOOK
AU  - Datta,Madhav
AU  - Sheppard,Keith
AU  - Dukovic,John O.
ED  - International Symposium on Electrochemical Microfabrication
ED  - Electrochemical Society.
TI  - Proceedings of the Second International Symposium on Electrochemical Microfabrication
T2  - Proceedings / Electrochemical Society
SN  - 1566770912
AV  - TK7874 .I4736 1994
U1  - 621.3815/2 20
PY  - 1995///
CY  - Pennington, NJ
PB  - Electrochemical Society
KW  - Microelectronics
KW  - Congresses
KW  - Electrochemistry, Industrial
KW  - Masks (Electronics)
KW  - Microelectronic packaging
KW  - Silicon
KW  - Microfabrication
N1  - "Electrodeposition Division."; The symposium was held Oct. 10-12, 1994, in Miami Beach, Fla; Includes bibliographical references and indexes
ER  -