Silicon microstructures for biomedical sensor systems /
by Lars Rosengren.
- Univ. 1994, 1994.
- 36 S. : Ill., graph. Darst.
- Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology / Uppsala Universitet: Acta Universitatis Upsaliensis / Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology 54 .