TY - BOOK AU - Rosengren,Lars TI - Silicon microstructures for biomedical sensor systems T2 - Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology / Uppsala Universitet: Acta Universitatis Upsaliensis / Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology SN - 9155433170 SN - 1104232X PY - 1994///, 1994 CY - Uppsala PB - Univ. KW - სილიკონის მიკროსტრუქტურები KW - ბიომედიცინა N1 - Vollst. zugl.: Uppsala, Univ., Diss., 1994 ER -