@book{510096,
	author = {Engqvist, Jan},
	title = {Thermodynamic and experimental CVD studies of TiSi₂ and W /},
	publisher = { Acta Universitatis Upsaliensis,},
	year = {1992.},
	series = {Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ;},
	address = {Uppsala :},
	note = {Dissertation: doctoral Uppsala University 1992.}
}