Engqvist, Jan Thermodynamic and experimental CVD studies of TiSi₂ and W / Jan Engqvist. - Uppsala : Acta Universitatis Upsaliensis, 1992. - 31 p. : fig. - Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ; 413 . Dissertation: doctoral Uppsala University 1992. Includes bibliographical references. ISBN: 9789155430184 9789155430184 Subjects--Index Terms: ფიზიკა თერმოდინამიკა ქიმია Universal Decimal Class. No.: 536.3 : 54