00872nam a2200253 4500 0 4 udc 0 0 CPL CPL GEN 2019-11-19 0 536.3 : 54 2019-137038 2019-11-19 00:00:00 3E16832 2019-11-19 BK 510096 510094 Ge_NSL 20191119155721.0 191119s1992 se ||||| |||| 00| 0 eng d 9789155430184 9789155430184 eng 536.3 : 54 Engqvist, Jan 137949 Thermodynamic and experimental CVD studies of TiSi₂ and W / Jan Engqvist. Uppsala : Acta Universitatis Upsaliensis, 1992. 31 p. : fig. Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ; 413 Dissertation: doctoral Uppsala University 1992. Includes bibliographical references. ფიზიკა თერმოდინამიკა ქიმია udc BK