TY - BOOK AU - Engqvist, Jan TI - Thermodynamic and experimental CVD studies of TiSi₂ and W T2 - Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology SN - 9789155430184 PY - 1992/// CY - Uppsala PB - Acta Universitatis Upsaliensis KW - ფიზიკა KW - თერმოდინამიკა KW - ქიმია N1 - Dissertation: doctoral Uppsala University 1992; Includes bibliographical references ER -