Smith L. <br/><br/>
Silicion Microstructures Fabrication Techniques and Applications /  
L. Smith ; Uppsala Universitet, Teknisk-Naturvetenskapliga Fakulteten. 
 -  Univ.,   1997. 
 - 36 p. 
 - Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology .
<br/><br/><label>Subjects--Index Terms: </label>ქიმია ფიზიკური ქიმია 
<br/><br/><label>Universal Decimal Class. No.: </label>544