TY  - BOOK
AU  - Smith L.
ED  - Uppsala Universitet
TI  - Silicion Microstructures Fabrication Techniques and Applications / 
T2  - Acta Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology
PY  - 1997///
CY  - Uppsala : 
PB  - Univ., 
KW  - ქიმია
KW  - ფიზიკური ქიმია
ER  -