TY  - BOOK
AU  - Kempe,Volker
TI  - Inertial MEMS: principles and practice 
SN  - 9780511933899 (ebook)
AV  - TK7875 .K46 2011
U1  - 629.04/5 22
PY  - 2011///
CY  - Cambridge
PB  - Cambridge University Press
KW  - Microelectromechanical systems
KW  - Inertial navigation systems
KW  - BioMEMS
N1  - Title from publisher's bibliographic system (viewed on 05 Oct 2015); Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index
N2  - A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area
UR  - https://doi.org/10.1017/CBO9780511933899
ER  -