@book{527350,
	author = {Forsgren, Katarina},
	title = {CVD and ALD of group IV- and V-oxides for dielectric applications / },
	publisher = {Acta Universitatis Upsaliensis, },
	year = {2001.},
	series = {Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ; },
	address = {Uppsala : }
}