Forsgren, Katarina <br/><br/>
CVD and ALD of group IV- and V-oxides for dielectric applications /  
Katarina Forsgren. 
 - Uppsala :   Acta Universitatis Upsaliensis,   2001. 
 - viii, 55 p. 
 - Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ;   665 .
 - Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology  Uppsala universitet  665 .
<br/><br/>Zugl.: Uppsala, Univ., Diss., 2001. 
<br/><br/><label>ISBN: </label>9155451438 
<br/><br/><label>Subjects--Index Terms: </label>ქიმია  არაორგანული ქიმია 
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Hochschulschrift
<br/><br/><label>Universal Decimal Class. No.: </label>546