TY  - BOOK
AU  - Forsgren,Katarina
TI  - CVD and ALD of group IV- and V-oxides for dielectric applications / 
T2  - Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ; 
SN  - 9155451438
PY  - 2001///
CY  - Uppsala : 
PB  - Acta Universitatis Upsaliensis, 
KW  - ქიმია
KW  - არაორგანული ქიმია
KW  - Hochschulschrift
KW  - gnd
N1  - Zugl.: Uppsala, Univ., Diss., 2001
ER  -