00346nam a22000977a 4500 220328s1988 se ||||| |||| 00| 0 eng d 621.38 Gustafsson, kari 229885 Silicon micromechanics with applications in optical scanning and sensing systems / Kari Gustafsson. Uppsala : Uppsala University, 1988. 0 4 udc 0 62138 0 460698 CPL CPL GEN 2022-03-28 0 621.38 2022-35844 2022-03-28 00:00:00 2E44853 2022-03-28 BK 0 4 udc 0 62138 0 460699 CPL CPL GEN 2022-03-28 0 621.38 2022-35845 2022-03-28 00:00:00 2E43137 2022-03-28 BK 577283 577281