00971nam a22002417a 4500003000700000005001700007008004100024022001400065041000800079080001400087245011200101264012000213300000700333500004500340653002300385653004800408653003200456710003600488710002900524942001200553952014700565999001700712Ge_NSL20160905160455.0160905d19759999us ||||| |||| 00| 0 eng d  a0022-5355  aeng  a533.5(05)  aJournal of vacuum science and technology :b1975 /cAmerican Institute of Physics. American Vacuum Society.  a[New York, N.Y.] :bPublished for the American Vacuum Society by the American Institute of Physics, c [1964-1982].  av.  aTitle varies slightly.
Title from cover.  aფიზიკა  aვაკუუმის ფიზიკა  aპერიოდიკა  aAmerican Institute of Physics.   aAmerican Vacuum Society.  2udccCR  00142udc4070aCPLbCPLcGENd2016-09-05hVol. 12 no. 1-6 (1975)l0o533.5(05) J80p2016-41524r2016-09-05 00:00:00tპ9836w2016-09-05yCR  c77087d77087