Journal of vacuum science and technology :  1978 / 
American Institute of Physics. American Vacuum Society. 
 - [New York, N.Y.] :  Published for the American Vacuum Society by the American Institute of Physics,    [1964-1982]. 
 - v. 
<br/><br/> Title varies slightly.<br/>Title from cover. 
<br/><br/><label>ISSN: </label>0022-5355 
<br/><br/><label>Subjects--Index Terms: </label>ფიზიკა ვაკუუმის ფიზიკა პერიოდიკა 
<br/><br/><label>Universal Decimal Class. No.: </label>533.5(05)