00759nam a22002057a 4500003000700000005001700007008004100024022001400065041000800079080001400087245011200101264012000213300000700333500004500340653002300385653004800408653003200456710003600488710002900524Ge_NSL20160905160845.0160905d19789999us ||||| |||| 00| 0 eng d  a0022-5355  aeng  a533.5(05)  aJournal of vacuum science and technology :b1978 /cAmerican Institute of Physics. American Vacuum Society.  a[New York, N.Y.] :bPublished for the American Vacuum Society by the American Institute of Physics, c [1964-1982].  av.  aTitle varies slightly.
Title from cover.  aფიზიკა  aვაკუუმის ფიზიკა  aპერიოდიკა  aAmerican Institute of Physics.   aAmerican Vacuum Society.