00813nam a22002297a 4500 Ge_NSL 20160905160845.0 160905d19789999us ||||| |||| 00| 0 eng d 0022-5355 eng 533.5(05) Journal of vacuum science and technology : 1978 / American Institute of Physics. American Vacuum Society. [New York, N.Y.] : Published for the American Vacuum Society by the American Institute of Physics, [1964-1982]. v. Title varies slightly. Title from cover. ფიზიკა ვაკუუმის ფიზიკა პერიოდიკა American Institute of Physics. American Vacuum Society. udc CR 0 4 udc 0 0 CPL CPL GEN 2016-09-05 Vol. 15 no. 1-6 (1978) 0 533.5(05) J80 2016-41529 2016-09-05 00:00:00 პ11784 2016-09-05 CR 77092 77092