TY  - BOOK
ED  - American Institute of Physics. 
ED  - American Vacuum Society.
TI  - Journal of vacuum science and technology: 1981 
SN  - 0022-5355
PY  - 1964///-1982]
CY  - [New York, N.Y.]
PB  - Published for the American Vacuum Society by the American Institute of Physics, 
KW  - ფიზიკა
KW  - ვაკუუმის ფიზიკა
KW  - პერიოდიკა
N1  - Title varies slightly.
Title from cover
ER  -