TY  - BOOK
ED  - American Vacuum Society.
ED  - American Institute of Physics.
TI  - Journal of vacuum science & technology : : A : 1983 : an official journal of the American Vacuum Society 
SN  - 0734-2101
PY  - 1983///-
CY  - New York
PB  -  Published for the Society by the American Institute of Physics, 
KW  - ფიზიკა
KW  - ვაკუუმის ფიზიკა
KW  - პერიოდიკა
N1  - Title from cover
ER  -