00987nam a22002417a 4500003000700000005001700007008004100024022001400065041000800079080001400087245016900101264008900270300000700359500002200366653002300388653004800411653003200459710002900491710003500520942001200555952016100567999001700728Ge_NSL20160906110337.0160906u19839999us ||||| |||| 00| 0 eng d  a0734-2101  aeng  a533.5(05)  aJournal of vacuum science & technology : bA : 1983 : an official journal of the American Vacuum Society /cAmerican Vacuum Society ; American Institute of Physics.  aNew York :b Published for the Society by the American Institute of Physics, c1983-  av.  aTitle from cover.  aფიზიკა  aვაკუუმის ფიზიკა  aპერიოდიკა  aAmerican Vacuum Society.  aAmerican Institute of Physics.  2udccCR  00142udc4070aCPLbCPLcGENd2016-09-06hVol. 1 no. 1, 2 (P. 1, 2), 4 (1983)l0o533.5(05) J80p2016-41574r2016-09-06 00:00:00tპ15930w2016-09-06yCR  c77137d77137