Journal of vacuum science & technology : B : 1989 : an official journal of the American Vacuum Society / American Vacuum Society ; American Institute of Physics. - New York : Published for the Society by the American Institute of Physics, 1983- - v. Title from cover. ISSN: 0734-211X Subjects--Index Terms: ფიზიკა ვაკუუმის ფიზიკა პერიოდიკა Universal Decimal Class. No.: 533.5(05)