Silicon front-end technology--materials processing and modelling / 
editors, Nicholas E.B. Cowern ... [et al.]. 
 -  Materials Research Society,  c1998. 
 - xi, 228 p. :  ill. (some col.) ;  24 cm. 
 - (Materials Research Society symposium proceedings ;  v. 532) .
 - Materials Research Socisty symposia ;  v. 532. .
<br/><br/> Proceedings of a symposium held April 13-15, 1998 in San Francisco, California. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>1558994386 
<br/><br/><label>LCCN: </label>98034108  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction--Congresses.<br/>Semiconductor doping--Congresses.<br/>Semiconductors--Defects--Congresses.
<br/><br/><label>LC Class. No.: </label>TK7871.85  / .S5464 1998 
<br/><br/><label>Dewey Class. No.: </label>621.3815/2 
<br/><br/><label>Universal Decimal Class. No.: </label>678.8