TY  - BOOK
AU  - Cowern,Nicholas E.B.
TI  - Silicon front-end technology--materials processing and modelling
T2  - (Materials Research Society symposium proceedings
SN  - 1558994386
AV  - TK7871.85 .S5464 1998
U1  - 621.3815/2 21
PY  - 1998///
CY  - Warrendale, Pa.
PB  - Materials Research Society
KW  - Semiconductors
KW  - Design and construction
KW  - Congresses
KW  - Semiconductor doping
KW  - Defects
N1  - Proceedings of a symposium held April 13-15, 1998 in San Francisco, California; Includes bibliographical references and index
ER  -