Semiconductor process and device performance modeling :  symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A. / 
editors, Scott T. Dunham, Jeffrey S. Nelson. 
 -  Materials Research Society,  c1998. 
 - ix, 273 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings,  v. 490  0272-9172 ; .
 - Materials Research Society symposia proceedings ;  v. 490. .
<br/><br/>Includes bibliographical references and indexes. 
<br/><br/><label>ISBN: </label>1558993959 
<br/><br/><label>LCCN: </label>98033841  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Mathematical models--Congresses.<br/>Semiconductors--Defects--Congresses.<br/>Solid state physics--Congresses.
<br/><br/><label>LC Class. No.: </label>TK7871.85  / .S46697 1998 
<br/><br/><label>Dewey Class. No.: </label>621.3815/2/015118 
<br/><br/><label>Universal Decimal Class. No.: </label>621.38(063)