TY  - BOOK
AU  - Dunham,S.T.
AU  - Nelson,Jeffrey S.
TI  - Semiconductor process and device performance modeling: symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposium proceedings,
SN  - 1558993959
AV  - TK7871.85 .S46697 1998
U1  - 621.3815/2/015118 21
PY  - 1998///
CY  - Warrendale, Pa.
PB  - Materials Research Society
KW  - Semiconductors
KW  - Mathematical models
KW  - Congresses
KW  - Defects
KW  - Solid state physics
N1  - Includes bibliographical references and indexes
ER  -