Arnold, Heinrich <br/><br/>
Chemische Dampfablagerung :  CVD-Grundlagen für die Mikroelektronik / 
Heinrich Arnold. 
 -  Akademie-Verlag,  1982. 
 - x, 158 p. :  26 ill. ;  22 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label> 22.00M 
<br/><br/><label>LCCN: </label>83165806  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Vapor-plating.
<br/><br/><label>Subjects--Index Terms: </label>ქიმია ფიზიკური ქიმია 
<br/><br/><label>LC Class. No.: </label>TS695  / .A75 1982 
<br/><br/><label>Dewey Class. No.: </label>671.7/35 
<br/><br/><label>Universal Decimal Class. No.: </label>544