TY  - BOOK
AU  - Söderbärg,Anders
TI  - Microelectronic devices based on ultra-shallow junctions and silicon-on-insulator materials
T2  - Acta Universitatis Upsaliensis : Comprehensive summaries of Uppsala dissertations from the Faculty of Science / Uppsala Universitet: Acta Universitatis Upsaliensis / Comprehensive summaries of Uppsala dissertations from the Faculty of Science
SN  - 9155428231
SN  - 02827468
PY  - 1991///, 1991
CY  - Uppsala
PB  - Univ.
N1  - Vollst. zugl.: Uppsala, Univ., Diss., 1991
ER  -