TY  - BOOK
AU  - Nuberg T.
ED  - Uppsala Universitet
TI  - Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology: Studies of the Reactive Sttering Process and CVD of Diamond Thin Films
T2  - Acta Universitatis Upsaliensis
SN  - 1104-232X
PY  - 1997///
CY  - Uppsala
PB  - Univ.
ER  -